MICRO-REACTION DETECTION SENSOR AND SYSTEM

PURPOSE:To miniaturize a sensor by forming a metal membrane or org. matter membrane between comb-shaped electrodes to which a surface wave is propagated. CONSTITUTION:A sensor 1 is composed of the sensing membrane 4 on the surface wave propagating surface between the input and output comb-shaped ele...

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Bibliographic Details
Main Authors ARAI YUKO, HONDA TAKU, KASHIMURA EIJI
Format Patent
LanguageEnglish
Published 16.05.1991
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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