MICRO-REACTION DETECTION SENSOR AND SYSTEM

• Main Authors: ARAI YUKO, HONDA TAKU, KASHIMURA EIJI
• Format: Patent
• Language: English
• Published: 16.05.1991
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

PURPOSE:To miniaturize a sensor by forming a metal membrane or org. matter membrane between comb-shaped electrodes to which a surface wave is propagated. CONSTITUTION:A sensor 1 is composed of the sensing membrane 4 on the surface wave propagating surface between the input and output comb-shaped electrodes 3, 3 provided on a piezoelectric substrate 2. A measuring cell 5 has a sensing part at the central recessed part thereof and is constituted so that the membrane 4 is left so as to be exposed and the other part is coated with silicone rubber 6 and further covered with an acrylic resin plate 7 and fixed to a bottom plate by screws 8 to be hermetically closed. Therefore, measurement is possible in both gaseous and liquid phases and the minute reaction quantity of the membrane in both liquid and gaseous phases or the minor component in environment can be detected with high sensitivity and this sensor can be adapted as a corrosion detection sensor, the temp. sensor or gas sensor in environment, a microorganism detection sensor or a minor ion concn. sensor as a probe evaluating the reliability of electronic data machinery. Further, this sensor is rich in mass productivity and can be formed in an extremely small size.