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Summary:PURPOSE:To form the plasma-polymerized film having fluid impermeability and gas barrier property from a gaseous monomer on the inside surface of a plastic tank by subjecting the inside surface of the plastic tank to an ion bombardment pretreatment, then supplying the gaseous monomer and generating a plasma discharge between the electrodes in the tank. CONSTITUTION:The electrodes 601, 602 are disposed to face each other in the plastic tank 10 consisting of polyethylene, polypropylene, etc., and the inside of the tank is evacuated to a reduced pressure. An inert gas, such as He or Ar is supplied from a cylinder 607 into the tank and a high-frequency voltage is impressed to the two electrodes 601, 602 by a electric power source 608 to generate the glow discharge and to generate the plasma by the inert gas, by which the ion bombardment treatment is executed and the wettability and adhesiveness of the inside surface of the tank are improved. The atmosphere in the tank is then replaced with the gaseous monomer 611, such as tetrafluoroethylene and the plasma is generated in the same manner as mentioned above. The plasma-polymerized film from this gaseous monomer is thus formed.
Bibliography:Application Number: JP19890246892