ELECTRON BEAM TESTER

• Main Author: HIROSE SHIGEMI
• Format: Patent
• Language: English
• Published: 26.01.1990
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

PURPOSE:To enable the comparison of the results of measurement and the measurement of a time on the basis of a specified voltage by conducting the measurement of an absolute value by turning a voltage of a power source for a sample to be zero volt partially in synchronization with a period of measurement. CONSTITUTION:A driving signal (a) to make a sample 1 conduct a necessary operation is impressed on the ample 1 from a sample driving signal source 8, while a source voltage (b) is supplied thereto from a power source 9 for the sample. Meanwhile, a primary electron beam 4 from an electron gun 3 of a scanning-type electron microscope (SEM) 2 is applied on a wiring of the sample 1 to be measured, and a secondary electron 5 therefrom is detected by a secondary electron detector 6. Since the source voltage (b) becomes zero volt for a certain period in synchronization with a measuring period, a wiring potential becomes also zero volt for a certain period and thus the measurement of an absolute value is enabled on the basis of a secondary electron detection output at the zero volt. Accordingly, the comparison of a plurality of results of measurement and the measurement of a time on the basis of a specified voltage are enabled.