THERMAL HEAD
PURPOSE:To form a wiring structure having satisfactory solder bondability and to reduce a manufacturing cost by providing wirings with heat generating resistors and an IC for controlling current flow thereto on an insulating board, and forming the wirings of a thin film structure of Cr/Cr-Au/Au. CON...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
21.09.1990
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Subjects | |
Online Access | Get full text |
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Summary: | PURPOSE:To form a wiring structure having satisfactory solder bondability and to reduce a manufacturing cost by providing wirings with heat generating resistors and an IC for controlling current flow thereto on an insulating board, and forming the wirings of a thin film structure of Cr/Cr-Au/Au. CONSTITUTION:A glazed layer 2 is formed and a resistor 3 is formed by sputtering, etc., on a specific alumina board 1. Then, films are formed of metallized Cr 4 and Au 5 for wiring electrodes in necessary thicknesses by sputtering, etc., and a pattern is formed by photoetching. Thereafter, a protective layer 6 is formed by sputtering on a whole board. Subsequently, an alloy layer 7 of Cr and Ar is formed on a boundary between the Cr and the Au by heat treating. In order to form it, a resistor having stable characteristics is obtained by heat treating at the time of annealing of the resistor, and the layer 7 of the Cr and the Ar can be formed. Then, a through hole for an external connection terminal is formed with a predetermined etchant in the layer 6. When the thus obtained electrode is connected with solder 8, stable characteristics having no improper solder leakage is obtained. |
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Bibliography: | Application Number: JP19890060943 |