X-Y STAGE

PURPOSE:To move a movable carriage at high speed, and to position the movable carriage accurately by driving the movable carriage by an ultrasonic linear motor. CONSTITUTION:In an X-Y stage, an X stage 14 is driven by the frictional force of the noses of the leg sections 21, 22 of an ultrasonic line...

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Bibliographic Details
Main Authors ONISHI KAZUMASA, NAITO KOICHI, NAKAZAWA TORU
Format Patent
LanguageEnglish
Published 24.04.1990
Subjects
COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATION
MACHINE TOOLS
MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS
METAL-WORKING NOT OTHERWISE PROVIDED FOR
PERFORMING OPERATIONS
TRANSPORTING
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Summary:PURPOSE:To move a movable carriage at high speed, and to position the movable carriage accurately by driving the movable carriage by an ultrasonic linear motor. CONSTITUTION:In an X-Y stage, an X stage 14 is driven by the frictional force of the noses of the leg sections 21, 22 of an ultrasonic linear motor 20 and the rail member 14 of the X stage 14, thus shifting the X stage 14 at high speed, then accurately positioning the X stage 14. The same effect is acquired by an ultrasonic linear motor 20A regarding even a Y stage 42. A rotary table 54 is driven by an ultrasonic motor 60, thus rotating the rotary table 54 at high speed, then precisely locating the rotary table 54.
Bibliography:Application Number: JP19880262009