LAMINATION APPARATUS

PURPOSE:To transfer a pattern with high accuracy without generating strain in a work at the time of patterning by constituting the title apparatus so that one set of housings are moved so as to relatively approach each other to stretch a transfer film in a support provided direction by the tare wt....

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Bibliographic Details
Main Authors NAKAMURA MITSUTERU, YUGAMI RYOICHI, EBISAWA HIROO
Format Patent
LanguageEnglish
Published 22.12.1989
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Summary:PURPOSE:To transfer a pattern with high accuracy without generating strain in a work at the time of patterning by constituting the title apparatus so that one set of housings are moved so as to relatively approach each other to stretch a transfer film in a support provided direction by the tare wt. of a transfer film frame body and grasping said film between one set of the housings. CONSTITUTION:The film frame 70 placed on guide rails 50a, 50b is supported and fixed by engaging the positioning pin 96 provided to a film frame support stand 28 with the hole opened to the under surface of the film frame 70. At this time, since the film frame support stand 28 is provided to a lower part so as to form difference in level between the close contact surface of the second and first vacuum boxes 46, 24 and a transfer film 78, the transfer film 78 is provided under tension by the film frame 70 so as to be turned in two directions wherein film supports 72a, 72b are positioned. Thereafter, the transfer film 78 is heated by the heater 48 provided to the second vacuum box 46 to be softened and expanded. Next, the vacuum box 22 is evacuated and the second vacuum box 46 is opened to the atmosphere to apply the transfer film 78 to the surface of a work 58.
Bibliography:Application Number: JP19880149482