CONDUCTIVE VACUUM CHUCK

• Main Authors: YAMADA EIJI, OMORI HITOSHI, IMAMURA MASATO, NAKAGAWA TAKEO
• Format: Patent
• Language: English
• Published: 13.11.1989
• Subjects: BASIC ELECTRIC ELEMENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; DRESSING OR CONDITIONING OF ABRADING SURFACES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; POLISHING; SEMICONDUCTOR DEVICES; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL; TRANSPORTING; WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OFELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKESTHE PLACE OF A TOOL

PURPOSE:To make it possible to perform the mirror finish of a laminated material simply and efficiently by assembling an adsorption plate, which is made of a permeable metallic sintered body, to a base with a suction passage, through an insulator provided with suction holes open to the suction passage. CONSTITUTION:When a workpiece is placed on an adsorption plate 3 and a vacuum pump is driven, negative pressure is exerted on the adsorption plate 3 through a suction tube 8, a suction passage hole 13, a recess area 12 for collecting air, a suction hole 21 and concentric grooves 20. Then since the adsorption plate 3 is formed with a permeable metallic sintered body and provided with innumerable fine pores, uniform suction force is generated on the surface of the suction plate, and the workpiece can be adsorbed and fixed to the plate without any deformation of the workpiece even if it is thin, while the plate can keep its preferable flatness. Consequently, the laminated workpiece can be adsorbed and fixed to the adsorption plate without any deformation, so that it can be processed with high performance and accuracy.