IONIZATION DEVICE OF NEUTRAL PARTICLE ANALYSIS DEVICE

• Main Author: KUMASHIRO SUMIO
• Format: Patent
• Language: English
• Published: 02.10.1989
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

PURPOSE:To improve resolution of energy and mass spectrograph and sensitivity of a neutral particle analysis device with simple configuration by employing internal electromagnetic field of an electron beam source composed of a mesh electrode and a reflector electrode to improve collision probability of neutral particles and electrons in an ionization room so as to improve ionization rate. CONSTITUTION:A reflector electrode 6 with U-shaped cross section is provided adjacent to outside of a filament 5 and has potential same as the filament 5 or some negative potential. Electrons irradiated from the filament 5 are accelerated towards a mesh electrode 4, passes through thereof, emitted into an ionization room and reciprocate in a narrow area where the ionization room is the center. Thus, collision probability of the electrons and neutral particles irradiated from a sample is improved, the electrons are hardly lost and effectively ionized. Therefore, improved is resolution of energy and mass spectrograph and sensitivity of a neutral particles analysis device.