ENERGY ANALYZING DEVICE

PURPOSE:To provide an energy analyzing device capable of analyzing both ions and neutral particles with high efficiency. and perfectly making energy discrimination by furnishing a relay part between a lead-in part and an energy analyzing part. CONSTITUTION:A lead-in part A, No.1 relay part B, energy...

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Bibliographic Details
Main Author KUMASHIRO SUMIO
Format Patent
LanguageEnglish
Published 28.08.1989
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:PURPOSE:To provide an energy analyzing device capable of analyzing both ions and neutral particles with high efficiency. and perfectly making energy discrimination by furnishing a relay part between a lead-in part and an energy analyzing part. CONSTITUTION:A lead-in part A, No.1 relay part B, energy analyzing part C, No. 2 relay part D, and output part E are arranged on a straight optical axis sequentially as named from the side nearer the specimen. Particularly, the No.1 relay part B is in coaxial configuration of an ion lens system B1 and an ion decelerating electrode B2. As the No.1 relay part B is furnished in such an arrangement as described, giving the secondary ion suction voltage to the lead-in part A enables irradiation of secondary ions radiated in a wide stereophonic angle on the energy analyzing part C. Because neutral particles are free from action of electric field, difference in the position of ion beam source viewed from the energy analyzing part C between at analysis of secondary ions and at analysis of neutral particles can be adjusted by the No.1 relay part B. This allows effective energy analysis for both secondary ions and neutral particles.
Bibliography:Application Number: JP19880040141