PROJECTION ALIGNER

• Main Author: SHODA SHUJI
• Format: Patent
• Language: English
• Published: 22.08.1989
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES

PURPOSE:To enable exposure-position alignment at an arbitrary position by installing a detachable reflecting plate at the position of a diaphragm for an imaging optical system and forming an image surface conjugate with a substrate and an image surface conjugate with a surface to be exposed by an alignment optical system. CONSTITUTION:Light from optical fibers 5, 5' for lighting marks for alignment respectively illuminates the marks 9, 9' for alignment on a reticle 1 and a wafer 3 through half mirrors 6, 6', alignment optical systems 7, 7' and imaging lenses 2, 2' by a mirror 4 inserted to the position of a diaphragm for the imaging lenses 2, 2' on alignment. Light reflected from the marks 9, 9 ' for alignment passes through the imaging lenses 2, 2' and is reflected by the mirror 4, and is detected on detectors 8, 8' through the alignment optical systems 7, 7' and the half mirrors 6, 6'. Since the detectors 8, 8' are not constrained by the positions of the alignment optical systems 7, 7' and are moved in each conjugate image surface and light can be detected, the marks 9, 9' for alignment can be placed at the arbitrary positions of respective substrate 1, 3.