SURFACE DEFECT INSPECTION INSTRUMENT

• Main Authors: ENDO KENJI, TAKAGAWA YUKIO
• Format: Patent
• Language: English
• Published: 16.08.1989
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

PURPOSE:To inspect a surface defect irrelevantly to the curved state of the surface shape of a body to be inspected by swiveling a laser generator provided to a device main body and slanting projected laser slit light. CONSTITUTION:A light projection part 3 is provided at the upper part of the instrument main body 1 and the laser generator 4 which projects the laser light light is incorporated rotatably. Then the laser light which is projected by rotating the laser generator 4 of the light projection part 3 is reflected regularly by a reflecting mirror 7 through a collimator lens 8 to irradiate the surface of a panel W as a body to be inspected, and reflected regularly here and photodetected by a camera 5. This laser light has extremely high directivity, so if there is a surface defect such as a flaw and a spot on the surface of the body W, the projected laser slit light is scattered there and the photoelectric conversion output of a line sensor varies. Therefore, whether or not there is the surface defect is detected from the level of the photoelectric conversion output.