PRODUCTION OF LIGHT GUIDE

PURPOSE:To form a light guide having a desired refractive index distribution and low loss by providing a three-layered structure consisting of an oxide film of a semiconductor film, a semiconductor and the oxide film of the semiconductor on a substrate. CONSTITUTION:The three-layered structure consi...

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Bibliographic Details
Main Author TSUCHIYA AKIRA
Format Patent
LanguageEnglish
Published 31.05.1989
Subjects
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Summary:PURPOSE:To form a light guide having a desired refractive index distribution and low loss by providing a three-layered structure consisting of an oxide film of a semiconductor film, a semiconductor and the oxide film of the semiconductor on a substrate. CONSTITUTION:The three-layered structure consisting of the oxide (SiO2)2 of the semiconductor, the semiconductor (a-Si)3, the oxide (SiO2)2 of the semiconductor is provided on the substrate 1 and there three layers are laser-annealed 4. The shape of grading can be changed by changing the power, spot diameter and scanning speed of the Ar laser at this time. The desired graded indices are thus obtd. The light guide having the desired refractive index distribution and the low loss is thereby obtd.
Bibliography:Application Number: JP19870298224