REDUCTION STEPPER

• Main Authors: NUMATA MITSUHIRO, TSUYUKI HISAMASA
• Format: Patent
• Language: English
• Published: 26.05.1989
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES

PURPOSE:To achieve a highly accurate superposition by detecting a number of position detecting patterns within a wafer, by performing distribution processing to check whether the obtained detection data are correct or not, and by extracting only the correct detected data. CONSTITUTION:A pattern on a...