JP2985904B

PURPOSE:To correct nonuniformity in the illuminance of X rays exactly by measuring the intensity of an X-ray photoelectron at a plurality of points in an area of analysis by using a standard sample, and by determining correction data at each point from measured data by an operation of interpolation....

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Bibliographic Details
Main Author ZENITANI FUKUO
Format Patent
LanguageEnglish
Published 06.12.1999
Edition6
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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