JP2984035B
PURPOSE:To prevent the generation of the failure of a base body and the peeling, etc., of thin films thermal strains by bringing a heat pipe into contact with the part of the base body where the thin films are not formed thereby equalizing the heat of the base body at the time of forming the thin fi...
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Main Authors | , , , , |
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Format | Patent |
Language | English |
Published |
29.11.1999
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Edition | 6 |
Subjects | |
Online Access | Get full text |
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