JP2964873B

• Main Authors: MITAMURA SHIGEHIRO, NOJI TAKETOSHI, MORIHISA JUJI
• Format: Patent
• Language: English
• Published: 18.10.1999
• Edition: 6
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

PURPOSE:To make alignment of optical axis easily by furnishing two specific sets of component moving mechanisms. CONSTITUTION:An optical axis aligning device 1 for electron beam is equipped with an electron source 11, a double deflector 12 to make deflection and scanning of electron beam 5 emitted by the electron source 11, a condenser lens 13 to make condensation of the beam 5 and irradiation of a specimen with it, apertures 14, 15 located on the axis of the condenser lens 13, an objective lens 16, and a moving mechanism. The moving mechanism comprises the first moving mechanism 21 (electron source driving part) which moves only the electron source 11 and the second moving mechanism 23 (lens barrel driving part) to make relative movement with the objective lens 16 in a single piece with the electron source 11, a dual deflector 12, a condenser lens 13, and apertures 14, 15, The alignment of the electron beam 5 with the condenser lens 13 and apertures 14, 15 is made by the first moving mechazism 21 and a dual deflector 12, and alignment with the objective lens 16 is made by the second moving mechanism 23.