JP2910943B

• Main Authors: HARA TAMIO, HAMAGAKI MANABU, KUSAKABE KAZUTOSHI, AOYANAGI KATSUNOBU
• Format: Patent
• Language: English
• Published: 23.06.1999
• Edition: 6
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PURPOSE:To provide a plasma generating device having extremely little ablation of a filament and a long life. CONSTITUTION:A needle valve 16 is gradually opened, and argon gas is introduced into a plasma generating device 9. A filament AC power source 26 is turned on, and the filament current If is gradually increased to the filament rated temperature. When a discharge power source 20 is turned on and the discharge voltage is applied, an electric discharge is started, and a discharge current Id flows. When the discharge current Id is increased, the sum of the filament heating current If and the discharge current Id/2 is detected by a detecting resistor 29 on the secondary side of a filament transformer, and this detection signal is fed to an error amplifier 30. The detected current value is compared with the rated current value by the error amplifier 30, a thyristor 31 is controlled based on the difference signal, and an increment of 1/2 of the discharge current Id is automatically subtracted from the heating current fed to a filament 10.