JP2879342B

• Main Authors: HARA TAMIO, HAMAGAKI MANABU, NANBA SUSUMU, AOYANAGI KATSUNOBU
• Format: Patent
• Language: English
• Published: 05.04.1999
• Edition: 6
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

PURPOSE:To vigorously make dissociation and excitation of gas molecules introduced to the space between a cathode and anode by applying a mag. field thereto in the direction intersecting the electrodischarge. CONSTITUTION:Ar gas is introduced from a hole 1' in a cylindrical cathode 1. By a power supply 3, plasma due to glow discharge is generated between the cathode 1 and a porous anode 2. Between these electrodes, throats 4, 4' functioning as intermediate electrodes 4, 4' are furnished, wherein a chamber on the cathode 1 side is held at 0.8Torr while a chamber on the anode 2 side at 0.01-0.04Torr. The anode side of the hole bore of this throat 4 is covered with Al type ceramic, while the throat 4' shall be insulation, and between the two a material gas lead-in hole 12 is provided. By magnetic poles 11, 11' a mag. field B is applied perpendicular to an electric field E, and a beam accelerating electrode 6 and ion pullout electrodes 7, 7' are furnished at the lower stage of the anode 2, and a voltage is impressed by power supplies 8, 9, 9'. Discharge is performed between the cathode and anode, and the material gas is introduced from the inlet 12. Because the discharge is made through the throats 4, 4' and maintained in the direction intersecting the mag. field, high plasma density and electron temp. are obtained. Therefore, BF for ex. is easy to dissociate to allow increase in the B atom share to a great extent.