JP2850061B

PURPOSE:To prevent a resist on the upper peripheral part of a substrate from sticking to the lower surface of a mask at the time of setting a gap between the mask and the substrate to be a prescribed value. CONSTITUTION:A recessed groove 9 which continues in accordance with the outline of the substr...

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Bibliographic Details
Main Authors SUZUKI HIROSHI, IWAMA SATORU, IKUMI MASUZO
Format Patent
LanguageEnglish
Published 27.01.1999
Edition6
Subjects
ACCESSORIES THEREFOR
APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES
APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM
APPARATUS SPECIALLY ADAPTED THEREFOR
CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS
CINEMATOGRAPHY
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
PRINTED CIRCUITS
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Summary:PURPOSE:To prevent a resist on the upper peripheral part of a substrate from sticking to the lower surface of a mask at the time of setting a gap between the mask and the substrate to be a prescribed value. CONSTITUTION:A recessed groove 9 which continues in accordance with the outline of the substrate 3 is installed on a position where the peripheral part of the substrate 3 gets near the surrounding of the lower surface of the mask 1, and the resist 7 which is mounded on the upper peripheral part of the substrate 3 is prevented from coming into contact with the lower surface of the mask 1 at the time of setting the gap (g) between the mask 1 and the substrate 3 to be the prescribed value by the recessed groove 9. Thus, the resist 7 can be prevented from sticking to the lower surface of the mask 1.
Bibliography:Application Number: JP19910098009