JP2531735B

PURPOSE:To prevent an erroneous inspection and the damage of a pellet in a minimum delay time by a method wherein, when the contact of a bonding tool with the pellet is detected, a strain of an ultrasonic horn is detected by using a strain sensor and this strain is compared with a reference value wh...

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Bibliographic Details
Main Authors SUEMATSU MUTSUMI, OOTANI KAZUMI
Format Patent
LanguageEnglish
Published 04.09.1996
Edition6
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE:To prevent an erroneous inspection and the damage of a pellet in a minimum delay time by a method wherein, when the contact of a bonding tool with the pellet is detected, a strain of an ultrasonic horn is detected by using a strain sensor and this strain is compared with a reference value which has been set in advance. CONSTITUTION:An ultrasonic horn 5 equipped with a bonding tool 4 at its tip protrudes and is installed at a tip part of an arm 1 of a wire bonding apparatus. A motor 7 is interconnected at the back of the arm 1; the bonding tool 4 and a lower clamber 6 can be turned backward and forward in the upper and lower directions. A strain sensor 10 is installed at a support plate 3; it is possible to detect a strain which is caused at the ultrasonic horn 5 when the bonding tool 4 comes into contact with a pellet 9. This strain is output to a comparator 12 through an amplifier 11; the comparator 12 compares an output from the strain sensor 10 with a reference value which has been set in advance. On the basis of this information, the motor 7 is controlled and corrected; a good bonding operation corresponding to a height of the pellet 9 can be executed.
Bibliography:Application Number: JP19880078734