PROCESSING APPARATUS, OPTICAL INSPECTION SYSTEM, SUBJECT SURFACE IMAGE COMPOSITION METHOD, DEFECT IDENTIFICATION IMAGE COMPOSITION METHOD, SUBJECT SURFACE IMAGE COMPOSITION PROGRAM, SUBJECT SURFACE ANGLE ESTIMATION METHOD, AND SUBJECT SURFACE INCLINATION ANGLE ESTIMATION PROGRAM

• Main Authors: ONO TAKAFUMI, KANO HIROYA, OKANO HIDEAKI, KAMIKAWA TAKAHIRO, SUZUKI SAYURI, TAKAGI YOSHIAKI, ONO HIROSHI, UJIHARA YOSUKE
• Format: Patent
• Language: English; Japanese
• Published: 17.01.2025
• Subjects: CALCULATING; COMPUTING; COUNTING; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

To provide a processing apparatus that performs processing to grasp a state of a subject surface having various shapes.SOLUTION: A processing apparatus used for a subject surface image composition includes one or more processors. The one or more processors, with respect to a plurality of captured images that an imaging portion has obtained while a surface of a subject moving relative to illumination light is irradiated with beams of the illumination light traveling in different directions in at least one plane and that includes a reference captured image in a plurality of times, shifts one or more captured images selected from the plurality of captured images and superimposes the shifted captured images on the reference captured image to compose at least one subject surface image.SELECTED DRAWING: Figure 10 【課題】 種々の形状を有する被写体表面の状態を把握するための処理を行う、処理装置を提供すること。【解決手段】 実施形態によれば、被写体表面画像の構成に用いる処理装置は、１又は複数のプロセッサを有する。１又は複数のプロセッサは、少なくとも１つの面内においてそれぞれ異なる方向に向かう照明光を、照明光に対して相対的に移動する被写体の表面に照射したときに撮像部により得た、基準となる撮像画像を含む複数時間における複数枚の撮像画像について、複数枚の撮像画像から選択される１又は複数の撮像画像をシフトさせて基準となる撮像画像に重ね合わせ、少なくとも１つの被写体表面画像を構成する。【選択図】 図１０