METHOD FOR EVALUATING INTERPLANAR SPACING OF CRYSTAL LATTICE

• Main Author: MORIMOTO TAKEHISA
• Format: Patent
• Language: English; Japanese
• Published: 23.08.2024
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

To improve accuracy of measurement using a moire image of a crystal lattice, obtained with a STEM, while solving an antinomy relation relating to the number of moires.SOLUTION: Provided are a method for evaluating the interplanar spacing of a surface group of equivalent Miller indexes in a crystal lattice in a sample with a scanning transmission electron microscope (STEM), and related technologies. The method includes: a scan line setting step for inclining a scan line relative to a direction parallel to the surface and making an interval between the scan lines narrower than the interplanar spacing; a moire image acquisition step following scan line setting step for obtaining a moire image of the crystal lattice with the STEM; a Fourier transform step for applying a Fourier transform to the moire image to subject a real space to inverse space conversion; a moire information acquisition step for obtaining a moire interval from a Fourier transformed image obtained by the inverse space conversion; and an evaluation step for evaluating the interplanar spacing from the moire interval.SELECTED DRAWING: Figure 3 【課題】ＳＴＥＭにより得られる結晶格子のモアレ像を利用する測定の精度を、モアレの本数に関する二律背反関係を解消しつつ向上させる。【解決手段】走査型透過顕微鏡（ＳＴＥＭ）により、試料内の結晶格子における等価なミラー指数の面群の面間隔を評価する方法であって、面に平行な方向に対して走査線を相対的に傾け、且つ、走査線同士の間隔を面間隔よりも狭くする走査線設定工程と、走査線設定工程後、ＳＴＥＭにより結晶格子のモアレ像を得るモアレ像取得工程と、モアレ像をフーリエ変換して実空間を逆空間化するフーリエ変換工程と、逆空間化して得られるフーリエ変換像からモアレ間隔を得るモアレ情報取得工程と、モアレ間隔から面間隔を評価する評価工程とを有する、結晶格子の面間隔の評価方法及びその関連技術を提供する。【選択図】図３