COAXIAL MICROWAVE PLASMA TORCH

• Main Authors: OGAWA MAKOTO, URAYAMA TAKUYA, TAKAHARA TOSHIHIRO, SAITO YOSHINOBU
• Format: Patent
• Language: English; Japanese
• Published: 24.07.2024
• Subjects: ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS

To improve stability of plasma of a coaxial microwave plasma torch, and extend a life of a discharge antenna.SOLUTION: A coaxial microwave plasma torch includes a main body 1 with a coaxial structure including a discharge antenna 2 on an inside and a counter electrode 3 on an outside, a microwave input unit 4 provided at a discharge antenna base end side of the main body, a plasma generation unit 6 provided at a discharge antenna tip end 2a side of the main body and communicating with a plasma exit 5, and a gas supply unit 7 that supplies gas to the plasma generation unit. The tip end of the discharge antenna is formed to be hemispherical.SELECTED DRAWING: Figure 1 【課題】同軸型マイクロ波プラズマトーチのプラズマの安定性を向上させるとともに、放電アンテナの寿命を延ばす【解決手段】内側の放電アンテナ２および外側の対向電極３からなる同軸構造を有する本体１と、本体における放電アンテナの基端側に設けられたマイクロ波入力部４と、本体における放電アンテナの先端２ａ側に設けられ、プラズマ出口５に連通したプラズマ生成部６と、プラズマ生成部にガスを供給するガス供給部７を備える。放電アンテナの先端が半球状に形成されている。【選択図】図１