VACUUM PUMP, AND FOREIGN MATTER SENSOR

To provide a vacuum pump that can accurately detect a change in capacitance.SOLUTION: A vacuum pump comprises an outer cylinder 127, etc. comprising an exhaust path through which exhaust gas flows, a spacer 131 with a screw to be heated by a heater 148, a base part 129 to be cooled by a water coolin...

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Bibliographic Details
Main Author KABASAWA TSUYOSHI
Format Patent
LanguageEnglish
Japanese
Published 07.06.2024
Subjects
BLASTING
HEATING
LIGHTING
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
MECHANICAL ENGINEERING
NON-POSITIVE DISPLACEMENT PUMPS
PHYSICS
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
TESTING
WEAPONS
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Summary:To provide a vacuum pump that can accurately detect a change in capacitance.SOLUTION: A vacuum pump comprises an outer cylinder 127, etc. comprising an exhaust path through which exhaust gas flows, a spacer 131 with a screw to be heated by a heater 148, a base part 129 to be cooled by a water cooling pipe 149, and a foreign matter sensor 210 for detecting foreign matter. The foreign matter sensor 210 comprises a pair of electrodes in which capacitance can be changed by accumulation of the foreign matter, and a capacitance measurement part for measuring the capacitance between the electrodes. The electrodes are arranged in the spacer 131 with the screw. The capacitance measurement part is arranged in the base part 129.SELECTED DRAWING: Figure 1 【課題】静電容量の変化を正確に検出することが可能な真空ポンプを提供する。【解決手段】排気ガスが流動する排気経路を有する外筒１２７等と、ヒータ１４８による加熱の対象となるネジ付スペーサ１３１と、水冷管１４９による冷却の対象となるベース部１２９と、異物の検出を行う異物センサ２１０と、を有し、異物センサ２１０が、異物の堆積により静電容量が変化し得る一対の電極と、電極間における静電容量の計測を行う静電容量計測部と、を備え、電極をネジ付スペーサ１３１に配設し、静電容量計測部をベース部１２９に配設した。【選択図】図１
Bibliography:Application Number: JP20220189152