HOLDING JIG AND METHOD FOR MANUFACTURING OPTICAL ELEMENT

• Main Authors: ITO MITSUHIDE, YASUNAKA SATOSHI
• Format: Patent
• Language: English; Japanese
• Published: 27.05.2024
• Subjects: APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PERFORMING OPERATIONS; PHYSICS; PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL; SPRAYING OR ATOMISING IN GENERAL; TRANSPORTING

To provide a technique for improving work efficiency of a film forming process.SOLUTION: A holding jig 1 for holding an optical element comprises: a base; a plurality of holding mechanisms for holding a peripheral edge of the optical element; a biasing member that biases a first holding mechanism 15 so that the first holding mechanism 15 among the holding mechanisms can rotate toward a side surface of the optical element to be held; and a lever 90 rotationally operable in a direction within a parallel surface with respect to a surface including a rotation direction of the first holding mechanism 15. By rotating the lever 90 to fix the first holding mechanism 15, the holding jig reduces biasing force applied to the optical element by the biasing member. A related technique is also provided.SELECTED DRAWING: Figure 1 【課題】成膜処理の作業効率を向上させる技術を提供する。【解決手段】光学素子を保持する保持治具１であって、基部と、光学素子の周縁部を保持する複数の保持機構と、複数の保持機構のうち第１の保持機構１５が、保持予定である光学素子の側面に向けて回動するように、第１の保持機構１５を付勢する付勢部材と、第１の保持機構１５の回動方向を含む面に対する平行面内の方向に回動操作可能なレバー９０と、を備え、 レバー９０を回動させて第１の保持機構１５を固定することにより、付勢部材による光学素子に対する付勢力を減少させる、保持治具１及びその関連技術を提供する。【選択図】図１