SAMPLE OBSERVATION STAGE AND SAMPLE MEASUREMENT DEVICE

• Main Author: ITO SHINTARO
• Format: Patent
• Language: English; Japanese
• Published: 15.05.2024
• Subjects: APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]; BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS; SCANNING-PROBE TECHNIQUES OR APPARATUS; TESTING

To provide a sample observation stage that can heat or cool a sample while suppressing the thermal expansion or thermal shrinkage of a sample stage in nano measurement.SOLUTION: A sample observation stage 1 for nano measurement, capable of heating or cooling a sample 91, comprises a temperature control element 11 that heats or cools the sample 91, a sample stage 21 on which the sample 91 is installed, and a heat medium 31 that is held between the temperature control element 11 and the sample stage 21, featuring thermal conductivity and flexibility. The thermal conductivity of the heat medium 31 is higher than the thermal conductivity of the sample stage 21.SELECTED DRAWING: Figure 1 【課題】ナノ計測において、試料ステージの熱膨張または熱収縮を抑制しつつ、試料を加熱または冷却することのできる試料観察台を提供する。【解決手段】試料９１を加熱または冷却可能なナノ計測用の試料観察台１は、試料９１を加熱または冷却する温度調整素子１１と、試料９１を設置する試料ステージ２１と、温度調整素子１１と試料ステージ２１との間にはさんで設置された、熱伝導性および柔軟性を持つ熱媒体３１と、を備える。熱媒体３１の熱伝導率は、試料ステージ２１の熱伝導率より高い。【選択図】図１