ELECTRON MICROSCOPE, MULTIPOLE, AND CONTROL METHOD FOR ELECTRON MICROSCOPE

To provide an electron microscope that can be reduced in aberration fluctuation due to thermal fluctuation.SOLUTION: The electron microscope includes an electron optical system incorporating an aberration correction device having a multipole 260 that generates a multipole field. The multipole 260 in...

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Bibliographic Details
Main Authors JIMBO YU, MORISHITA SHIGEYUKI
Format Patent
LanguageEnglish
Japanese
Published 15.05.2024
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:To provide an electron microscope that can be reduced in aberration fluctuation due to thermal fluctuation.SOLUTION: The electron microscope includes an electron optical system incorporating an aberration correction device having a multipole 260 that generates a multipole field. The multipole 260 includes a plurality of magnetic poles 4. Each of the plurality of magnetic poles 4 includes a pole 6, a first coil 8a wound around the pole 6, and a second coil 8b wound around the pole 6. A first multipole field created by excitation of the first coil 8a and a second multipole field created by excitation of the second coil 8b have the same symmetry.SELECTED DRAWING: Figure 8 【課題】熱変動による収差の変動を低減できる電子顕微鏡を提供する。【解決手段】多極子場を発生させる多極子２６０を有する収差補正装置が組み込まれた電子光学系を含み、多極子２６０は、複数の磁極４を含み、複数の磁極４の各々は、極子６と、極子６に巻回された第１コイル８ａと、極子６に巻回された第２コイル８ｂと、を含み、第１コイル８ａを励磁することによって作られる第１多極子場と、第２コイル８ｂを励磁することによって作られる第２多極子場は、同じ対称性を有している。【選択図】図８
Bibliography:Application Number: JP20220174716