SCAN-TYPE PROBE MICROSCOPE

• Main Authors: HASHIZUME TOMIHIRO, TAKAGUCHI MASANARI, TAKAHASHI TERUO
• Format: Patent
• Language: English; Japanese
• Published: 01.05.2024
• Subjects: APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; SCANNING-PROBE TECHNIQUES OR APPARATUS; TESTING

To provide a scan-type probe microscope which can easily determine a measurement position even when the numerical aperture of an objective lens is relatively large.SOLUTION: A scan-type probe microscope includes: a probe for scanning a sample; a light source for applying excitation light on the probe through an objective lens; and a detector for detecting fluorescence generated from the probe. The scan-type probe microscope further includes: a reflective member arranged between the objective lens and the sample; and an imaging device for taking an image of a reflection surface of the reflection member.SELECTED DRAWING: Figure 1 【課題】 対物レンズの開口数が比較的大きい場合であっても測定箇所を容易に決定可能な走査型プローブ顕微鏡を提供する。【解決手段】 試料を走査するプローブと、前記プローブに対物レンズを介して励起光を照射する光源と、前記プローブで生じる蛍光を検出する検出器を備える走査型プローブ顕微鏡であって、前記対物レンズと前記試料との間に配置される反射部材と、前記反射部材の反射面を撮像する撮像装置をさらに備えることを特徴とする。【選択図】図１