SUBSTRATE PROCESSING DEVICE AND SUBSTRATE GRIPPING DEVICE
To provide a technology that improves maintainability of a substrate holder.SOLUTION: A substrate processing device according to an embodiment supplies a processing liquid to the surface of a rotating substrate. The substrate processing device includes a substrate holding portion. The substrate hold...
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Main Authors | , , , , , |
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Format | Patent |
Language | English Japanese |
Published |
24.04.2024
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Subjects | |
Online Access | Get full text |
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Summary: | To provide a technology that improves maintainability of a substrate holder.SOLUTION: A substrate processing device according to an embodiment supplies a processing liquid to the surface of a rotating substrate. The substrate processing device includes a substrate holding portion. The substrate holding portion holds the substrate. The substrate holding portion includes a grip portion and a base portion. The gripping portion contacts the periphery of the substrate and grips the substrate. The grip portion is attached to the base portion.SELECTED DRAWING: Figure 3
【課題】基板保持部のメンテナンス性を向上させる技術を提供する。【解決手段】実施形態に係る基板処理装置は、回転する基板の表面に処理液を供給する。基板処理装置は、基板保持部を備える。基板保持部は、基板を保持する。基板保持部は、把持部と、土台部とを備える。把持部は、基板の周縁に接触し、基板を把持する。土台部は、把持部が取り付けられる。【選択図】図3 |
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Bibliography: | Application Number: JP20220163724 |