PULSE REDUCTION DEVICE, COOLING DEVICE, LITHOGRAPHY DEVICE AND ARTICLE PRODUCTION METHOD

• Main Author: YAMAGAMI YUYA
• Format: Patent
• Language: English; Japanese
• Published: 18.04.2024
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

To provide technology beneficial for enhancing the operational efficiency of systems into which cooling devices are incorporated.SOLUTION: A pulse reduction device includes: a buffer tank that is disposed to communicate with a circulation route having a pump for circulating the liquid and that stores both liquid and gas so as to reduce the pulsation of the liquid along the circulation route; an adjustment mechanism that adjusts the quantity of gas within the buffer tank; a detector that detects the level of liquid in the buffer tank; and a calculator that estimates changes in the liquid level based on output from the detector.SELECTED DRAWING: Figure 1 【課題】冷却装置が組み込まれる装置の運用効率の向上に有利な技術を提供する。【解決手段】脈動低減装置は、液体を循環させるためのポンプが設けられた循環経路に連通するように配置され、前記循環経路における液体の脈動が低減されるように液体および気体を貯留する緩衝タンクと、前記緩衝タンクの中の気体の量を調整するための調整機構と、前記緩衝タンクの中の液体の液面の高さを検出する検出器と、前記検出器の出力に基づいて前記液面の高さの変化を推定する演算器と、を備える。【選択図】図１