SENSOR DEVICE

To improve spatial resolution of sensor devices.SOLUTION: A sensor device is provided, comprising multiple substrates arranged side-by-side in a thickness direction thereof, and multiple sensors arranged along the multiple substrates, where each of the multiple sensors is provided at a different pos...

Full description

Saved in:
Bibliographic Details
Main Authors TSUKANO KIYOHITO, TAKEDA SHOMA, TERAO FUMITAKE, SHIOSAKI SHOICHI
Format Patent
LanguageEnglish
Japanese
Published 11.04.2024
Subjects
DETECTING MASSES OR OBJECTS
GEOPHYSICS
GRAVITATIONAL MEASUREMENTS
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
Online AccessGet full text

Cover

More Information
Summary:To improve spatial resolution of sensor devices.SOLUTION: A sensor device is provided, comprising multiple substrates arranged side-by-side in a thickness direction thereof, and multiple sensors arranged along the multiple substrates, where each of the multiple sensors is provided at a different position in plane view of the multiple substrates.SELECTED DRAWING: Figure 2 【課題】センサ装置の空間分解能を向上させる。【解決手段】センサ装置は、基板厚さ方向に並んで配置された複数の基板と、複数の基板上にわたって配置された複数のセンサと、を備え、複数の基板を平面視したときに、複数のセンサそれぞれが異なる位置に配置されている。【選択図】図２
Bibliography:Application Number: JP20220157946