SENSOR DEVICE
To improve spatial resolution of sensor devices.SOLUTION: A sensor device is provided, comprising multiple substrates arranged side-by-side in a thickness direction thereof, and multiple sensors arranged along the multiple substrates, where each of the multiple sensors is provided at a different pos...
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Main Authors | , , , |
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Format | Patent |
Language | English Japanese |
Published |
11.04.2024
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Subjects | |
Online Access | Get full text |
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Summary: | To improve spatial resolution of sensor devices.SOLUTION: A sensor device is provided, comprising multiple substrates arranged side-by-side in a thickness direction thereof, and multiple sensors arranged along the multiple substrates, where each of the multiple sensors is provided at a different position in plane view of the multiple substrates.SELECTED DRAWING: Figure 2
【課題】センサ装置の空間分解能を向上させる。【解決手段】センサ装置は、基板厚さ方向に並んで配置された複数の基板と、複数の基板上にわたって配置された複数のセンサと、を備え、複数の基板を平面視したときに、複数のセンサそれぞれが異なる位置に配置されている。【選択図】図2 |
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Bibliography: | Application Number: JP20220157946 |