PRESSURE SENSOR

• Main Authors: KOBAYASHI MASANORI, SASAHARA TETSUYA, UNNO TAKESHI, HATA TETSUO
• Format: Patent
• Language: English; Japanese
• Published: 29.03.2024
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

To detect the adhesion of water droplets or the like on a membrane before an abnormality occurs in a detection value of a Wheatstone bridge circuit.SOLUTION: A pressure sensor includes: a Wheatstone bridge circuit formed by a plurality of resistors on a membrane; a plurality of bridge electrodes which are electrically connected to the Wheatstone bridge circuit and constitute a portion of an outer surface of the membrane and to which wires for connecting the Wheatstone bridge circuit to outside are connected; a detection electrode which is disposed between one bridge electrode and another bridge electrode on the membrane, constitutes another portion of the outer surface, and is provided separately from any of the bridge electrodes; and a resistance change detection unit for detecting a change in resistance between the detection electrode and at least one of the plurality of bridge electrodes.SELECTED DRAWING: Figure 2 【課題】メンブレン上における水滴等の付着を、ホイートストンブリッジ回路の検出値に異常が生じる前に検出する。【解決手段】メンブレン上において複数の抵抗体により形成されたホイートストンブリッジ回路と、前記ホイートストンブリッジ回路に電気的に接続しており、前記メンブレン上における外表面の一部を構成し、前記ホイートストンブリッジ回路に対する外部への配線が接続する複数のブリッジ電極と、前記メンブレン上において１つの前記ブリッジ電極と他の１つの前記ブリッジ電極との間に配置されており、前記外表面の他の一部を構成し、いずれの前記ブリッジ電極とも分離して設けられる検出電極と、前記検出電極と、複数の前記ブリッジ電極の少なくとも一つとの間の抵抗変化を検出する抵抗変化検出部と、を有する圧力センサ。【選択図】図２