MAGNETIC SENSOR DEVICE AND MANUFACTURING METHOD OF THE SAME

To provide a magnetic sensor device having high measurement accuracy and allowing further reduction in thickness.SOLUTION: The magnetic sensor device has a laminate structure in which a sensor substrate with a surface, and a sensor element part provided on the surface and including one or more magne...

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Bibliographic Details
Main Authors YAMAWAKI KAZUMA, MIYAZAKI SHUHEI
Format Patent
LanguageEnglish
Japanese
Published 27.03.2024
Subjects
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Summary:To provide a magnetic sensor device having high measurement accuracy and allowing further reduction in thickness.SOLUTION: The magnetic sensor device has a laminate structure in which a sensor substrate with a surface, and a sensor element part provided on the surface and including one or more magnetic sensor elements are laminated. In plan view parallel to the surface, at least part of an outer edge of the sensor element part is positioned different from an outer edge of the sensor substrate.SELECTED DRAWING: Figure 3A 【課題】高い測定精度を有すると共に、さらなる薄型化に対応可能である磁気センサ装置を提供する。【解決手段】この磁気センサ装置は、表面を有するセンサ基板と、表面に設けられ、１以上の磁気センサ素子を有するセンサ素子部との積層構造を備える。ここで、表面に平行な平面視において、センサ素子部の外縁の少なくとも一部の位置がセンサ基板の外縁と異なった位置にある。【選択図】図３Ａ
Bibliography:Application Number: JP20220146434