ACTIVE VIBRATION ISOLATION SYSTEM AND LEVELING METHOD THEREOF

• Main Authors: OTA HIROTO, FUJIWARA SEIYA, TAKAHASHI SHINGO
• Format: Patent
• Language: English; Japanese
• Published: 21.03.2024
• Subjects: BLASTING; ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; HEATING; LIGHTING; MEANS FOR DAMPING VIBRATION; MECHANICAL ENGINEERING; SHOCK-ABSORBERS; SPRINGS; THERMAL INSULATION IN GENERAL; WEAPONS

To realize as precise and balanced leveling as possible without impairing convergence.SOLUTION: A controller 100 executes leveling control for actuating sequentially, a plurality of leveling mechanisms 4 on the basis of detection signals of a plurality of surface plate displacement sensors 5 so as to make first displacement z1 fall within a predetermined allowable range R1, before starting an active vibration insolation system S. The controller 100, during the leveling control, repeatedly executes a first step of deciding the leveling mechanism 4 corresponding to a supporting position P where deviation D1 between the first displacement z1 and the allowable range R1 is maximum, among the plurality of leveling mechanisms 4, and a second step of actuating the leveling mechanism 4 decided in the first step for reducing the deviation D1.SELECTED DRAWING: Figure 8 【課題】収束性を損なうことなく、可能な限り精密かつバランスのよいレベリングを実現する。【解決手段】コントローラ１００は、アクティブ除振システムＳの起動に先だって、前１変位ｚ１がそれぞれ所定の許容範囲Ｒ１に収まるよう、複数の定盤変位センサ５の検出信号に基づいて複数のレベリング機構４を順番に作動させるレベリング制御を実行し、コントローラ１００は、レベリング制御に際し、複数のレベリング機構３のうち、第１変位ｚ１と許容範囲Ｒ１とのずれＤ１が最大となる支持位置Ｐに対応したレベリング機構４を決定する第１工程と、ずれＤ１が低減されるように、第１工程によって決定されたレベリング機構４を作動させる第２工程と、を繰り返し実行する。【選択図】図８