CONVEYANCE SYSTEM, LITHOGRAPHY SYSTEM, AND ARTICLE MANUFACTURING METHOD

• Main Authors: ISHIKAWA ISAMU, MOGI YASUHIRO, IWAIZUMI TOMOHIRO, YAZAWA YASUHIRO
• Format: Patent
• Language: English; Japanese
• Published: 13.03.2024
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES

To provide a conveyance system that is advantageous in simplifying a device.SOLUTION: The conveyance system includes a storage unit for storing first information about the location of an object in a containment vessel among a plurality of objects, an information generating unit for generating second information about the location of a first object in the containment vessel on the basis of information about driving a hand that conveys the first object among the plurality of objects that is outside the containment container into the containment container, and an information updating unit for updating the first information on the basis of the second information.SELECTED DRAWING: Figure 1 【課題】 装置の単純化に有利な搬送システムを提供する。【解決手段】 複数の物体のうち格納容器内にある物体の位置に関する第１情報を記憶する記憶部と、前記複数の物体のうち前記格納容器外にある第１物体を前記格納容器内へ搬送するハンドの駆動に関する情報に基づいて、前記格納容器内における前記第１物体の位置に関する第２情報を生成する情報生成部と、前記第２情報に基づいて前記第１情報を更新する情報更新部と、を備える。【選択図】 図１