LUMINAIRE, INSPECTION APPARATUS AND INSPECTION METHOD FOR INSPECTING CONVEXOCONCAVE OF INSPECTION OBJECT SURFACE

• Main Authors: YAMADA TAKAYA, TANAKA KENTA, SAIGO TOMOYASU
• Format: Patent
• Language: English; Japanese
• Published: 13.03.2024
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

To provide a luminaire, an inspection apparatus and an inspection method for reliably detecting micro convexoconcave of an inspection object surface.MEANS FOR SOLVING THE PROBLEM: An inspection equipment 1 for inspecting convexoconcave of an inspection object surface 13 comprises: a luminaire 2 including a planar LED light source 20 emitting white light, a first optical diffraction part 21 composed of a first holographic diffraction optical element 23 through which light emitted from the planar LED light source 20 transmits and is diffracted, and a second optical diffraction part 22 composed of a second holographic diffraction optical element 24 on which, when light emitted from the first optical diffraction part 21 transmits therethrough, the light is diffracted in a direction opposite to the first optical diffraction part 21; an inspection object table 12 the inspection object 11 is placed on a top face and third irradiation light 29 emitted from the luminaire 2 emitted to the surface 13 of the inspection object 11; and a detection part 4 for detecting reflected light 30 from the inspection object 11.SELECTED DRAWING: Figure 1 【課題】検査対象物表面の微小な凹凸を確実に発見できる照明装置、検査装置および検査方法を提供する。【課題を解決するための手段】検査対象物の表面１３の凹凸を検査するための検査装置１は、白色光を放射する面状ＬＥＤ光源２０と、面状ＬＥＤ光源２０から放射された光が透過する時に回折する第１ホログラフィック回折光学素子２３から構成される第１光回折部２１と、第１光回折部２１から放射された光が透過する時に、第１光回折部２１とは逆方向に回折する第２ホログラフィック回折光学素子２４から構成される第２光回折部２２と、を備える照明装置２と、検査対象物１１が上面に載置され、照明装置２から放射された第３照射光２９が検査対象物１１の表面１３に照射される検査物載置台１２と、検査対象物１１からの反射光３０を検出する検出部４を備える。【選択図】図１