ANALYZER AND MEASUREMENT METHOD

• Main Authors: WATANABE MASAHIRO, CHANG KE-BONG, YONAMOTO YOSHIKI
• Format: Patent
• Language: English; Japanese
• Published: 13.03.2024
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

To provide an analyzer with which, while downsizing a measurement probe, it is possible to measure an inner diameter inside of a component and simultaneously analyze a surface state.SOLUTION: The analyzer comprises: a first electromagnetic wave source that emits a first electromagnetic wave to the surface of a sample; a measurement light source and an interferometer that irradiate the surface of the sample with a second electromagnetic wave and measure the surface shape of the sample by the second electromagnetic wave; a light condensation unit that condenses the first and second electromagnetic beams onto the irradiated point of the sample; a dichroic mirror that separates the elastic scattering wave (mainly reflected wave) and the non-elastic scattering wave of the first and second electromagnetic waves from the sample; and a spectroscope that measures the chemical composition and defects on the surface of the sample on the basis of the non-elastic scattering wave separated by the dichroic mirror.SELECTED DRAWING: Figure 1 【課題】計測プローブを小型化しつつ、部品内部の内径計測と同時に表面状態の分析が可能な分析装置を提供する。【解決手段】試料の表面に第１電磁波を照射する第１電磁波源と、前記試料の表面に第２電磁波を照射し、当該第２電磁波により前記試料の表面の形状を計測する計測光源と干渉計と、前記第１電磁波と前記第２電磁波の電磁波ビームを前記試料の照射箇所に集光する集光部と、前記試料からの前記第１電磁波および前記第２電磁波の弾性散乱波（主に反射波）と非弾性散乱波とを分離するダイクロイックミラーと、前記ダイクロイックミラーで分離された前記非弾性散乱波に基づいて、前記試料の表面の化学組成および欠陥を計測する分光器と、を備えることを特徴とする。【選択図】図１