PROCESSING DEVICE AND PROCESSING SYSTEM

• Main Authors: MOYAMA KAZUKI, NAGASEKI KAZUYA, MATSUDA TOSHIYA
• Format: Patent
• Language: English; Japanese
• Published: 04.03.2024
• Subjects: BASIC ELECTRIC ELEMENTS; CONVEYING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HANDLING THIN OR FILAMENTARY MATERIAL; PACKING; PERFORMING OPERATIONS; PNEUMATIC TUBE CONVEYORS; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; STORING; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

To facilitate an exchange of a consumable component.SOLUTION: A component transportation device that transports a consumable component, comprises: a component housing part; a container; a robot arm; and a movement mechanism. The component housing part houses an unused consumable component and a used consumable component. The container includes an opening connected to the processing device, and a gate valve for opening or closing the opening; and houses the component housing part. The robot arm is provided in the container; includes an end effector at a tip end; carries out the used consumable component from the processing device through the opening to put into the component housing part; and takes out the unused consumable component from the component housing part and carries it into the processing device through the opening. The movement mechanism includes a power source, and moves the component transportation device.SELECTED DRAWING: Figure 9 【課題】消耗部品の交換を容易にする。【解決手段】消耗部品を運搬する部品運搬装置であって、部品収容部と、容器と、ロボットアームと、移動機構とを備える。部品収容部は、使用前の消耗部品および使用後の消耗部品を収容する。容器は、処理装置に接続される開口部と開口部を開閉するゲートバルブとを有し、部品収容部を収容する。ロボットアームは、容器内に設けられ、先端にエンドエフェクタを有し、処理装置から開口部を介して使用後の消耗部品を搬出して部品収容部内に収容し、使用前の消耗部品を部品収容部から取り出して開口部を介して処理装置内に搬入する。移動機構は、動力源を有し、部品運搬装置を移動させる。【選択図】図９