MANUFACTURING METHOD OF LIGHT EMITTING ELEMENT

• Main Authors: MIWA HIROSHI, SAITO YOSHIKI, BOYAMA SHINYA, NAGATA KENGO
• Format: Patent
• Language: English; Japanese
• Published: 08.02.2024
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

To provide a manufacturing method of a light emitting element including a light emitting functional portion made of a group III nitride semiconductor, and capable of forming a base layer with excellent transmittance and surface flatness on PSS.SOLUTION: A manufacturing method of a light emitting element 1 according to the present invention includes the steps of forming a base layer 12 made of AlN on a PSS 10 via a buffer layer 11 made of AlN, and epitaxially growing a group III nitride semiconductor on the base layer 12 to form a light emitting function unit 13 including a light emitting layer 132, and in the step of forming the base layer 12, the base layer 12 is formed by epitaxially growing AlN using an MOVPE method with the V/III ratio of the source gas being in the range of 1.0 or more and 2.0 or less.SELECTED DRAWING: Figure 1 【課題】ＩＩＩ族窒化物半導体からなる発光機能部を備えた発光素子の製造方法であって、透過率及び表面の平坦性に優れた下地層をＰＳＳ上に形成することのできる発光素子の製造方法を提供する。【解決手段】本発明の一態様として、ＰＳＳ１０上に、ＡｌＮからなるバッファ層１１を介して、ＡｌＮからなる下地層１２を形成する工程と、下地層１２上に、ＩＩＩ族窒化物半導体をエピタキシャル成長させて、発光層１３２を含む発光機能部１３を形成する工程と、を含み、下地層１２を形成する工程において、原料ガスのＶ／ＩＩＩ比を１．０以上、２．０以下の範囲内として、ＭＯＶＰＥ法によりＡｌＮをエピタキシャル成長させて、下地層１２を形成する、発光素子１の製造方法を提供する。【選択図】図１