MEMBER FORMING METHOD, LAMINATE MANUFACTURING METHOD AND MEMBER FORMING DEVICE

• Main Authors: KAWAHARA KOJI, WATANABE KOJI, KATO RYOSUKE, OGAWA TOMOTAKA
• Format: Patent
• Language: English; Japanese
• Published: 07.02.2024
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

To easily obtain a near net shaped member.SOLUTION: A member forming method including parts having different thicknesses on a surface of a base material by a thermal CVD method comprises: supplying a material gas to the surface of the base material from a gas outlet while heating the base material; and satisfying at least any of following conditions 1-3. The condition 1: a plurality of gas outlets is arranged at positions facing the surface, and a vertical distance from the gas outlet to the surface is different for each gas outlet; the condition 2: the plurality of gas outlets is arranged at the positions facing the surface, and a flow rate of the material gas flowing from the gas outlet is different for each gas outlet; and the condition 3: the heated base material has different temperatures in a direction along the surface.SELECTED DRAWING: Figure 1 【課題】ニアネットシェイプ部材を容易に得る。【解決手段】基材の表面の上に、熱ＣＶＤ法によって、厚さが異なる部分を有する部材を形成する方法であって、上記基材を加熱しつつ、上記表面に原料ガスをガス出口から供給し、下記条件１～３の少なくともいずれかを満たす、部材形成方法。条件１：上記表面と対向する位置に複数の上記ガス出口が配置され、上記ガス出口から上記表面までの垂直距離が上記ガス出口ごとに異なる。条件２：上記表面と対向する位置に複数の上記ガス出口が配置され、上記ガス出口から出る上記原料ガスの流量が上記ガス出口ごとに異なる。条件３：加熱された上記基材が、上記表面に沿った方向に、異なる温度を有する。【選択図】図１