DEFECT INSPECTION DEVICE, DEFECT INSPECTION METHOD, AND DEFECT INSPECTION PROGRAM

• Main Author: MORIYA AKIRA
• Format: Patent
• Language: English; Japanese
• Published: 25.01.2024
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

To improve inspection accuracy in defect areas.SOLUTION: A defect inspection device 10 includes an acquisition section 20A, an evaluation target image generation section 20C, a defect estimation image generation section 20D, and an iteration control section 20I. The acquisition section 20A acquires an inspection image obtained by imaging an inspection target and a reference image of the inspection target in design. The evaluation target image generation section 20C generates an evaluation target image according to the inspection image and the reference image. The defect estimation image generation section 20D generates a defect estimation image obtained by defining a defect estimation value for each pixel on the basis of a feature of a defect candidate area corresponding to an image area of consecutive pixels each of which has a pixel value equal to or greater than a first threshold value and which are included in the evaluation target image. The iteration control section 20I controls the defect estimation image generation section 20D to iterate defect estimation image generation processing using the defect estimation image as the evaluation target image.SELECTED DRAWING: Figure 1 【課題】欠陥領域の検査精度の向上を図る。【解決手段】欠陥検査装置１０は、取得部２０Ａと、評価対象画像生成部２０Ｃと、欠陥推定画像生成部２０Ｄと、繰り返し制御部２０Ｉと、を備える。取得部２０Ａは、検査対象を撮影した検査画像および検査対象の設計時の基準画像を取得する。評価対象画像生成部２０Ｃは、検査画像および基準画像に応じた評価対象画像を生成する。欠陥推定画像生成部２０Ｄは、評価対象画像に含まれる第１閾値以上の画素値の画素が連続する画像領域に応じた欠陥候補領域の特徴量に基づいて、画素ごとに欠陥推定値を規定した欠陥推定画像を生成する。繰り返し制御部２０Ｉは、欠陥推定画像を評価対象画像とした欠陥推定画像生成処理を繰り返すように欠陥推定画像生成部２０Ｄを制御する。【選択図】図１