SUBSTRATE PROCESSING DEVICE, TRANSFER TEACHING METHOD

To enable teaching to be performed without introducing a teaching substrate from outside a substrate processing device.SOLUTION: A substrate processing device has a processing chamber, a transfer robot that transfers substrates to be processed in the processing chamber, a teaching substrate for teac...

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Bibliographic Details
Main Authors TAKAYAMA YUICHI, UCHIDA YUZO, TSUCHIYA KEIICHI, SATO TAKUYA, WANG ZHIDA
Format Patent
LanguageEnglish
Japanese
Published 17.01.2024
Subjects
BASIC ELECTRIC ELEMENTS
CHAMBERS PROVIDED WITH MANIPULATION DEVICES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HAND TOOLS
MANIPULATORS
PERFORMING OPERATIONS
PORTABLE POWER-DRIVEN TOOLS
SEMICONDUCTOR DEVICES
TRANSPORTING
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Summary:To enable teaching to be performed without introducing a teaching substrate from outside a substrate processing device.SOLUTION: A substrate processing device has a processing chamber, a transfer robot that transfers substrates to be processed in the processing chamber, a teaching substrate for teaching the position of the substrate to the transfer robot, and a storage location where the teaching substrate is stored.SELECTED DRAWING: Figure 11 【課題】教示用基板を基板処理装置の外部から導入することなく、教示を実行可能とする。【解決手段】基板処理装置は、処理室と、処理室における処理の対象となる基板を搬送する搬送ロボットと、搬送ロボットに基板の位置を教示するための教示用基板と、教示用基板を格納する格納場所とを備える。【選択図】図１１
Bibliography:Application Number: JP20220105565