DUST COLLECTION METHOD

• Main Authors: OZAKI MOE, ONO TETSUHIRO, TAKAGI DAI
• Format: Patent
• Language: English; Japanese
• Published: 17.01.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLIDMATERIALS OR FLUIDS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROMSOLID MATERIALS OR FLUIDS; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS; SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATICTABLES OR JIGS; TRANSPORTING

To provide a dust collection method that can stably collect particles in a vacuum chamber.SOLUTION: A conveyed object Gs for dust collection is one in which at least the surface is covered with an insulating material, the surface of an object to be transported for dust collection is charged to a positive or negative potential using an ionizer in the air. At this time, the charging potential is set to a potential lower than the discharge starting potential determined by Paschen's law (charging step). The charged object to be transported for dust collection is transported to a vacuum chamber Lc, Pc1 to Pc3 in a vacuum atmosphere, and the particles existing inside the object are attached to the object to be transported for dust collection (dust collection step).SELECTED DRAWING: Figure 1 【課題】真空チャンバ内のパーティクルを安定して集塵できる集塵方法を提供する。【解決手段】少なくとも表面が絶縁物で覆われたものを集塵用搬送物Ｇｓとし、大気雰囲気中にてイオナイザにより集塵用搬送物の表面を正または負の電位に帯電させる。このとき帯電電位をパッシェンの法則より定められる放電開始電位より低い電位に設定する（帯電工程）。帯電した状態の集塵用搬送物を真空雰囲気の真空チャンバＬｃ、Ｐｃ１～Ｐｃ３に搬送してその内部に存するパーティクルを集塵用搬送物に付着させる（集塵工程）。【選択図】図１