GAS SENSOR

To reduce heat dissipation at an insulation film.SOLUTION: The present disclosure relates to a gas sensor comprising a substrate 1, an opening 6 provided through the substrate 1, a membrane 3 covering the opening 6, a sensor unit 4 mounted on the membrane 3 at a position above the opening 6 to detec...

Full description

Saved in:
Bibliographic Details
Main Authors USUI TAKAHIDE, FUJII NOBUHIKO, KUBOTA HARUKA, KIKUCHI NAOKI, ONO SATORU
Format Patent
LanguageEnglish
Japanese
Published 28.12.2023
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
Online AccessGet full text

Cover

More Information
Summary:To reduce heat dissipation at an insulation film.SOLUTION: The present disclosure relates to a gas sensor comprising a substrate 1, an opening 6 provided through the substrate 1, a membrane 3 covering the opening 6, a sensor unit 4 mounted on the membrane 3 at a position above the opening 6 to detect gas, a heater 4d mounted on the membrane 3 at a position above the opening 6 to heat the sensor unit 4, and at least one slit 5 provided through the membrane 3 at a position corresponding to an outer periphery of the senor unit 4 and the heater 4d.SELECTED DRAWING: Figure 1 【課題】本開示は、絶縁膜での放熱量を減少させることを目的とする。【解決手段】本開示は、基板１と、基板１に設けられている開口部６と、開口部６を覆うメンブレン３と、メンブレン３の開口部６上に搭載され、ガスを検知するセンサ部４と、メンブレン３の開口部６上に搭載され、センサ部４を加熱するヒーター４ｄと、センサ部４及びヒーター４ｄの外周のメンブレン３に配置されている、少なくとも一つのスリット５と、を備えるガスセンサである。【選択図】図１
Bibliography:Application Number: JP20220098423