ATMOSPHERE CUT-OFF DEVICE AND ATMOSPHERE NON-EXPOSED CONVEYANCE METHOD

• Main Authors: TANJI TAKAYOSHI, YASUDA HIDEHIRO, INOUE KAZUE
• Format: Patent
• Language: English; Japanese
• Published: 26.12.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

To provide a deformable and compact atmosphere cut-off device which can reduce an influence on a sample holder due to an atmospheric pressure variation and disturbance in an atmosphere, and when moving a sample to an another place, cut-off the atmosphere in each sample holder to conveyance it so as to have less oxygen and water.SOLUTION: An atmosphere cut-off device is constructed by: a chamber part 6 that cut-offs a sample holder 3 from an atmosphere; and a connection part 5 that adheres and connects the chamber part to a sample mounting part 2 of an observation and analysis device 1, and can deform a whole structure so that a lid 10, a vacuum valve, a gas introduction valve, and a gate valve can be detached and attached. By freely combining parts, the device becomes an atmosphere cut-off cover that cuts off a device outer exposure part of the sample holder 3 from an atmosphere at the time of the observation and an analysis. In the case where the sample is moved to an another location from the observation and analysis device, the sample holder is just cut off from the atmosphere, and it can be conveyed between globe boxes in a state of less oxygen and water. The lid 10 having a connector 11 can be exchanged in accordance with necessary.SELECTED DRAWING: Figure 1 【課題】試料ホルダーへの気圧変動や大気の乱れによる影響を低減し、試料を別の場所へ移動する際に試料ホルダーごと大気から遮断して酸素や水分が少ない状態にして搬送することが可能な変形可能でコンパクトな大気遮断装置を提供する。【解決手段】試料ホルダー３を大気から遮断させるためのチャンバー部６と、チャンバー部を観察・分析装置の試料装着部２に密着接続させる接続部５から構成され、蓋１０や真空バルブ、ガス導入バルブ、ゲートバルブが着脱可能で全体の構造を変形することができる。パーツの自在な組み合わせにより、観察・分析時には試料ホルダー３の装置外露出部を大気から遮断する大気遮断カバーとなり、観察・分析装置１から試料を別の場所へ移動する場合には試料ホルダーごと大気から遮断し酸素や水分が少ない状態にしてグローブボックスとの間を搬送することができる。コネクター１１を有する蓋１０は必要に応じて交換可能である。【選択図】図１