CHARGED PARTICLE BEAM DEVICE AND IMAGE ACQUISITION METHOD

• Main Authors: TSUTSUMI KENICHI, IKEO NOBUYUKI
• Format: Patent
• Language: English; Japanese
• Published: 25.12.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

To provide a charged particle beam device capable of reducing blurs of an image caused by positional displacement between frame images.SOLUTION: A charged particle beam device includes: an optical system in which a probe is formed from charged particle beams and a specimen is scanned by the probe; a control section for iteratively performing correction processing to correct displacement of an irradiation position of the probe on the specimen and image acquisition processing to acquire a frame image by causing the optical system to scan an observation region of the specimen using the probe; and an image processing section for generating an image of the specimen based on a plurality of frame images. The control section acquires a reference image by causing the optical system to scan the observation region using the probe and corrects the displacement of the irradiation position of the probe based on a positional displacement amount between a criterion image and the reference image in the correction processing. The image processing section corrects the positional displacement between the frame images based on positional displacement information between the criterion image and the reference image and generates the image of the specimen based on the plurality of corrected frame images.SELECTED DRAWING: Figure 5 【課題】フレーム画像間の位置ずれに起因する画像のぼけを低減できる荷電粒子線装置を提供する。【解決手段】本発明に係る荷電粒子線装置は、荷電粒子線でプローブを形成し、プローブで試料を走査する光学系と、試料上におけるプローブの照射位置のずれを補正する補正処理および光学系にプローブで試料の観察領域を走査させてフレーム画像を取得する画像取得処理を繰り返し行う制御部と、複数のフレーム画像に基づいて、試料の画像を生成する画像処理部と、を含み、制御部は、補正処理において、光学系にプローブで観察領域を走査させて参照画像を取得し、基準画像と参照画像との間の位置ずれ量に基づいてプローブの照射位置のずれを補正し、画像処理部は、基準画像と参照画像との間の位置ずれ情報に基づいて各フレーム画像間の位置ずれを補正し、補正された複数のフレーム画像に基づいて試料の画像を生成する。【選択図】図５