LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD

• Main Authors: NOBUKUNI RIKI, ITAHASHI TAKUYA, WAKAYAMA SHOTA, HORIGUCHI RYOICHI, OJIMA TOMOAKI
• Format: Patent
• Language: English; Japanese
• Published: 21.12.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

To reduce the number of components of a processing liquid supply mechanism of a liquid processing apparatus.SOLUTION: A liquid processing apparatus comprises a tank, a circulation passage, a pump, a plurality of liquid processing units, and a plurality of supply passages. The circulation passage includes a main passage portion on which the pump is provided, and a first branch passage portion and a second branch passage portion that branch from the main passage portion. The circulation passage is configured so that processing liquid flowing out from the tank flows into the respective branch passage portions after passing through the main passage portion, and returns to the tank passing through the respective branch passage portions. The plurality of liquid processing units are divided into a first processing unit group and a second processing unit group. The plurality of supply passages are divided into a first passage group and a second passage group. Each of the liquid processing units belonging to the first processing unit group is connected to the first branch passage portion via the supply passage belonging to the first passage group. Each of the liquid processing units belonging to the second processing unit group is connected to the second branch passage portion via the supply passage belonging to the second passage group.SELECTED DRAWING: Figure 1 【課題】液処理装置の処理液供給機構の部品点数の削減【解決手段】液処理装置は、タンクと、循環通路と、ポンプと、複数の液処理部と、複数の供給通路と、を備え、循環通路は、ポンプが設けられた主通路部分と、主通路部分から分岐した第１分岐通路部分および第２分岐通路部分とを有し、タンクから流出した処理液は、主通路部分を通過した後に、各分岐通路部分に流入し、各分岐通路部分を通ってタンクに戻るように構成されており、複数の液処理部は、第１処理部群と第２処理部群とに分割され、複数の供給通路は、第１通路群と第２通路群とに分割され、第１処理部群に属する液処理部はそれぞれ第１通路群に属する供給通路を介して第１分岐通路部分に接続され、第２処理部群に属する液処理部はそれぞれ第２通路群に属する供給通路を介して第２分岐通路部分に接続されている。【選択図】図１