VACUUM PUMP, AND EVACUATION SYSTEM

• Main Author: KABASAWA TSUYOSHI
• Format: Patent
• Language: English; Japanese
• Published: 21.12.2023
• Subjects: BASIC ELECTRIC ELEMENTS; BLASTING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HEATING; LIGHTING; MECHANICAL ENGINEERING; NON-POSITIVE DISPLACEMENT PUMPS; POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTMACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTPUMPS; SEMICONDUCTOR DEVICES; WEAPONS

To provide a vacuum pump that can remove deposits by a large amount of high-temperature fluid.SOLUTION: A turbo molecular pump 100 comprises a hot air generator 210 for increasing the temperature of heating fluid, a heating fluid inflow port 216, and a valve device 212 for controlling the flow of th...