VACUUM PUMP, AND EVACUATION SYSTEM

• Main Author: KABASAWA TSUYOSHI
• Format: Patent
• Language: English; Japanese
• Published: 21.12.2023
• Subjects: BASIC ELECTRIC ELEMENTS; BLASTING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HEATING; LIGHTING; MECHANICAL ENGINEERING; NON-POSITIVE DISPLACEMENT PUMPS; POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTMACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTPUMPS; SEMICONDUCTOR DEVICES; WEAPONS

To provide a vacuum pump that can remove deposits by a large amount of high-temperature fluid.SOLUTION: A turbo molecular pump 100 comprises a hot air generator 210 for increasing the temperature of heating fluid, a heating fluid inflow port 216, and a valve device 212 for controlling the flow of the heating fluid. The valve device 212 controls the flow of the heating fluid so that the heating fluid is supplied into the turbo molecular pump 100 while the turbo molecular pump 100 is at rest or in low-speed operation. The turbo molecular pump 100 comprises fluid transfer means. The fluid transfer means can supply the heating fluid at a flow rate at least 10 times as high as a maximum flow rate at which it can be exhausted while the turbo molecular pump 100 is in rated operation.SELECTED DRAWING: Figure 5 【課題】多量の高温流体により堆積物を除去することが可能な真空ポンプを提供する。【解決手段】ターボ分子ポンプ１００は、加熱用流体の温度を上昇させる熱風発生器２１０と、加熱用流体流入口２１６と、加熱用流体の流れを制御するバルブ装置２１２と、を備える。バルブ装置２１２が、ターボ分子ポンプ１００の停止中又は低速運転中にターボ分子ポンプ１００内へ加熱用流体が供給されるよう、加熱用流体の流れを制御する。ターボ分子ポンプ１００は、流体移送手段を備える。流体移送手段は、ターボ分子ポンプ１００の定格運転中に排気可能な最大流量の少なくとも１０倍の加熱用流体を供給可能である。【選択図】図５